JPH0376841B2 - - Google Patents

Info

Publication number
JPH0376841B2
JPH0376841B2 JP59118818A JP11881884A JPH0376841B2 JP H0376841 B2 JPH0376841 B2 JP H0376841B2 JP 59118818 A JP59118818 A JP 59118818A JP 11881884 A JP11881884 A JP 11881884A JP H0376841 B2 JPH0376841 B2 JP H0376841B2
Authority
JP
Japan
Prior art keywords
thin film
sample
electrons
thickness
work function
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59118818A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60262005A (ja
Inventor
Masayuki Uda
Fumiaki Kirihata
Sukenori Shirohashi
Hiroshi Ishida
Shinji Marutani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Riken Keiki KK
RIKEN
Original Assignee
Riken Keiki KK
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Riken Keiki KK, RIKEN filed Critical Riken Keiki KK
Priority to JP59118818A priority Critical patent/JPS60262005A/ja
Publication of JPS60262005A publication Critical patent/JPS60262005A/ja
Publication of JPH0376841B2 publication Critical patent/JPH0376841B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP59118818A 1984-06-09 1984-06-09 膜厚計測方法 Granted JPS60262005A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59118818A JPS60262005A (ja) 1984-06-09 1984-06-09 膜厚計測方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59118818A JPS60262005A (ja) 1984-06-09 1984-06-09 膜厚計測方法

Publications (2)

Publication Number Publication Date
JPS60262005A JPS60262005A (ja) 1985-12-25
JPH0376841B2 true JPH0376841B2 (en]) 1991-12-06

Family

ID=14745895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59118818A Granted JPS60262005A (ja) 1984-06-09 1984-06-09 膜厚計測方法

Country Status (1)

Country Link
JP (1) JPS60262005A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104309U (en]) * 1984-12-14 1986-07-02
US4823368A (en) * 1987-06-30 1989-04-18 Rikagaku Kenkyujyo Open counter for low energy electron detection with suppressed background noise
JPS6437689U (en]) * 1987-08-31 1989-03-07
JPS6437688U (en]) * 1987-08-31 1989-03-07
JPH03202709A (ja) * 1989-12-28 1991-09-04 Showa Alum Corp アルミニウム箔表面の圧延油付着量測定方法

Also Published As

Publication number Publication date
JPS60262005A (ja) 1985-12-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term